Design and Analysis of Piezo- Driven Valve-Less Micropump

P. Somasundaram*, S. Chandika**, C. Jegadheesan***
* Professor, Department of Mechanical Engineering, KSR college of Technology, Thiruchengode.
** Lecturer, Department of Mechatronics Engineering, Kongu Engineering College, Perundurai, Erode.
*** Lecturer, Department of Mechatronics Engineering, Kongu Engineering College, Perundurai, Erode.
Periodicity:November - January'2009
DOI : https://doi.org/10.26634/jfet.4.2.512

Abstract

Nowadays researchers are focussing on compact system design for all engineering applications without sacrificing the system performance. This paper deals with the importance of micro electro mechanical systems and its usage in day-to-day life. One such mechanical component is mechanical pump, which is used in various sectors of industrial, household and medical systems.  This work is concentrated on Piezo-driven valve-less micro pump, which does not have check valves. The fluid flow direction is controlled by converging and diverging nozzles. Thermo Electro Mechanical Analysis is done to evaluate mechanical (stress, force, pressure, acceleration, piezoelectric), thermal (temperature, convection, heat flux, resistive heating—including variable resistors and Piezo resistors) and Electrical (capacitive forces defined by voltages) properties.

Keywords

Piezo, Electro Mechanical System, Micro Pump.

How to Cite this Article?

Somasundaram, P., Chandika, S., and Jegadheesan, C. (2009). Design And Analysis Of Piezo - Driven Valve - Less Micropump. i-manager’s Journal on Future Engineering and Technology, 4(2), 22-26. https://doi.org/10.26634/jfet.4.2.512

References

[1]. Wounder van der wijngaart, Helene Andersson, Peter Enoksson, Kjell Noren and G.stemme. “The First Self- Priming And Bi-Directional Valve-Less Diffuser Micropump For Both Liquid And Gas”, Proc. IEEE Micro Electro Mechanical Systems, PP -674,2000
[2]. H.T.G.Van Lintel, F.C.M Van De Pol and S.Bouwstra. “A piezoelectric micropump based on micro-machining of silicon”, Sensors and Actuators A, Vol.15, pp-153, 1989.
[3]. M.Esashi, S.Shoji, A.Nakano. “Normally close microvalve and micropump fabricated on a silicon wafer”, Proc.MEMS, pp-29, 1989.
[4]. Jan G.Smits “Piezoelectric micropump with microvalves”, pp- 92-94, IEEE 1989.
[5]. M. Stehr, S. Messner, H. Sandmaier, R. Zengerie. “The VAMP- A New Device for Handling Liquid or Gas”, Sensors and Actuators, pp. 153-157, ELSEVIER 1996.
[6]. E. S temme and G. S temme. “A Val ve- Les s Diffuser\Nozzle Based Fluid Pump”, Sensors and Actuators, Vol. 39, pp. 159, 1995.
[7]. F.K. Forster, L. Bardell, M.A. Afromowitz, N.R. Sharma, and A. Blanchard. “Design Fabrication And Testing Of Fixed-Valve Micropumps”, Proc.ASME 1995, Vol.234, pp. 39
[8]. Anders Olsson, G.Stemme, E.Stemme. “The First Valve- Less Diffuser Gas Pump, Proceedings MEMS '97, Nagoya.
[9]. X.N.Jiang, Z.Y.Zhou, X.Y.Huang, Y.Li, Y.Yang, C.Y.Liu. “Micro nozzle/ diffuser flow and its application in micro valve-less pumps”, IEEE Sensors and Actuators, Vol A70, pp. 81-87, 1998.
[10]. G.Stemme, E.Stemme and Anders Olsson, A Valveless planar fluid pump with two pump chambers, IEEE Sensors and Actuators, Vol 46-47,pp. 549-556,(1995).
[11]. Tai-Ran Hsu, MEMS and Microsystems, Tata McGraw Hill.
[12]. Francis E.H Tay and W.O Choong Microfludics and BioMEMS Applications.
[13]. A.K.S. Matsumoto, R.Maeda, “Development of Bidirectional valve-less micro pump for Liquid”, Proceedings MEMS'99, Florida.
[14]. R.Zengerlc e.a, “A Bi-directional silicon micro pump”, 1995, IEEE Sensors and Actuators, Vol A50, pp 81-86.
[15]. AmosUllmann, “The piezoelectric valve-less pumpperformance enhancement analysis”, IEEE Sensors and Actuators, Vol A69 (1998), pp. 97-105.
If you have access to this article please login to view the article or kindly login to purchase the article

Purchase Instant Access

Single Article

North Americas,UK,
Middle East,Europe
India Rest of world
USD EUR INR USD-ROW
Pdf 35 35 200 20
Online 35 35 200 15
Pdf & Online 35 35 400 25

Options for accessing this content:
  • If you would like institutional access to this content, please recommend the title to your librarian.
    Library Recommendation Form
  • If you already have i-manager's user account: Login above and proceed to purchase the article.
  • New Users: Please register, then proceed to purchase the article.